CHANNELING STIM AND ITS APPLICATIONS

Channeling scanning transmission ion microscopy (CSTIM) has been used to explore transmission channeling in thin Si and SiC crystals. The CS TIM technique was applied to the investigation of the quality of appro ximately 30 mum thick SiC crystal. In this work the results from chann eling contrast microscopy (CCM) were combined with CSTIM. The channeli ng STIM (CSTIM) technique is almost 100% efficient, which reduces the analysis time, and the beam causes negligible damage, compared to back scattering channeling contrast microscopy (CCM). CSTIM is capable of v ery high resolution (50 nm). These features can be successfully applie d to the investigation of crystal damage and small size imperfections in samples transparent to the beam.