INSITU MULTIDIMENSIONAL OBSERVATION OF MASKLESSLY IMPLANTED SITES USING MEV HEAVY-ION MICROPROBES

Authors
MOKUNO Y HORINO Y CHAYAHARA A KIUCHI M FUJII K SATOU M TAKAI M
Citation
Y. Mokuno et al., INSITU MULTIDIMENSIONAL OBSERVATION OF MASKLESSLY IMPLANTED SITES USING MEV HEAVY-ION MICROPROBES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 373-377
Citations number
5
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
77
Issue
1-4
Year of publication
1993
Pages
373 - 377
Database
ISI
SICI code
0168-583X(1993)77:1-4<373:IMOOMI>2.0.ZU;2-F
Abstract
A multi-dimensional structure consisting of two masklessly implanted r egions of gold was successfully fabricated into a silicon wafer by 0.6 MeV Au+ and 1.8 MeV Au2+ ion microbeams and this structure was analyz ed in-situ by a 3 MeV C2+ ion microprobe. The three-dimensional distri bution of gold atoms was observed by complete three-dimensional Ruther ford backscattering spectrometry (RBS) mapping and the change in surfa ce condition was clearly observed by ion induced secondary electron (S E) imaging, The advantages of the three-dimensional RBS mapping method have been shown.