X-RAY REFLECTIVITY AND SCANNING-TUNNELING-MICROSCOPE STUDY OF KINETICROUGHENING OF SPUTTER-DEPOSITED GOLD-FILMS DURING GROWTH

Authors
YOU H CHIARELLO RP KIM HK VANDERVOORT KG
Citation
H. You et al., X-RAY REFLECTIVITY AND SCANNING-TUNNELING-MICROSCOPE STUDY OF KINETICROUGHENING OF SPUTTER-DEPOSITED GOLD-FILMS DURING GROWTH, Physical review letters, 70(19), 1993, pp. 2900-2903
Citations number
23
Categorie Soggetti
Physics
Journal title
Physical review letters → ACNP
ISSN journal
00319007
Volume
70
Issue
19
Year of publication
1993
Pages
2900 - 2903
Database
ISI
SICI code
0031-9007(1993)70:19<2900:XRASSO>2.0.ZU;2-C
Abstract
An in situ x-ray reflectivity study of the dynamic evolution of a grow ing interface was carried out for gold sputter-deposited onto a polish ed silicon substrate. X-ray reflectivity data were recorded during gro wth for thicknesses of the gold film ranging from 50 to 3500 angstrom. A progressive kinetic roughening of the gold-vacuum interface was obs erved and the time-dependent interfacial width exhibits a power-law be havior. Aided by scanning-tunneling-microscopy measurements the scalin g exponents were determined and compared with theoretical studies.