EXCIMER-LASER POLYMER ABLATION - FORMATION OF POSITIVELY CHARGED SURFACES AND ITS APPLICATION INTO THE METALLIZATION OF POLYMER-FILMS

Excimer laser ablation of poly(ethylene terephthalate), polyimide, and polyethersulfone films has been investigated by measuring the surface potential on the films and the velocity distribution in ionic fragmen ts. Upon the irradiation with XeCl or KrF excimer laser in air, the su rface potential of the films changed from neutral to positive. By the measurement of velocity distribution in ionic fragments with a Faraday cup assembly, it turned out that the change into a positive potential on the films was mainly caused by the redeposition of cationic fragme nts onto the surface of the ablated area. The change in surface potent ial was applied into the area-selective electroless plating (chemical plating) of copper or nickel on the ablated surface of the films.