LASER DIRECT WRITING OF GOLD TO REPAIR DEFECTIVE LINES IN THIN-FILM METALLIZATIONS

Laser chemical vapour deposition (LCVD) with dimethylgold hexafluoroac etylacetonate was used to repair defective lines in thin-film metalliz ations on alumina ceramic and polyimide. A process is described to dep osit gold on polyimide and various substrates. Different patterns were deposited. Resistivities on polyimide have been achieved which are lo wer than 4.7 muOMEGA . cm, which is twice the value of bulk gold. Bond strengths of 10 N/mm2 were measured on polyimide. With this method co ntacts have been produced to thin-film gold metallizations. Contact re sistances have been measured in the range of 5-10 mOMEGA.