DEPOSITION OF YBA2CU3OX BY LASER ABLATION ON SI(100) USING DIFFERENT BUFFER LAYERS

Superconducting YBa2Cu3Ox (YBCO) thin films have been obtained on Si(1 00) substrates with yttria-stabilized zirconia (YSZ), CeO2 and SrTiO3 buffer layers. The YBCO and the buffer films were deposited by laser a blation. The films were characterized by X-ray diffraction (XRD), fiel d emission scanning electron microscopy (FESEM), scanning electron mic roscopy (SEM), secondary ion mass spectrometry (SIMS), and four-contac t electrical resistivity. X-ray diffraction spectra show well oriented buffer layers and secondary ion mass spectrometry results indicate lo w interdiffusion between YBCO, buffer layers and Si. YBCO films with t he c-axis perpendicular to the substrate are obtained for the three ma terials used as buffers. The best films show a normal state metallic b ehaviour with zero resistance around 84 K. The crystalline and electri cal properties of the films are related with the substrate temperature . The substrate temperature range for the best properties depends on t he nature of the buffer layer.