Pt. Murray et Dt. Peeler, DYNAMICS OF GRAPHITE PHOTOABLATION - KINETIC-ENERGY OF THE PRECURSORSTO DIAMOND-LIKE CARBON, Applied surface science, 69(1-4), 1993, pp. 225-230
The mechanisms for growth of diamond-like carbon by pulsed laser depos
ition have been investigated. Two distinct but related issues have bee
n addressed: (1) the nature and speed of the particles ejected from gr
aphite by pulsed UV laser irradiation and (2) the extent to which the
kinetic energy of the ablated particles determines the character of th
e resultant films. The results indicate that C3+ and C-3(0) are the pr
edominant ion and neutral particles ejected from graphite by 248 nm la
ser radiation. These particles are ablated from graphite with mean kin
etic energies of 18 and 0.25 eV, respectively. Carbon films were grown
in the presence of various collision gases in order to decrease the e
nergy of the ablated particles. Kinetic energy of the particles was fo
und to play a significant role in the generation of diamond-like films
.