ACOUSTIC INSITU MONITORING OF EXCIMER-LASER ABLATION OF DIFFERENT CERAMICS

Authors
GRAD L MOZINA J
Citation
L. Grad et J. Mozina, ACOUSTIC INSITU MONITORING OF EXCIMER-LASER ABLATION OF DIFFERENT CERAMICS, Applied surface science, 69(1-4), 1993, pp. 370-375
Citations number
9
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
69
Issue
1-4
Year of publication
1993
Pages
370 - 375
Database
ISI
SICI code
0169-4332(1993)69:1-4<370:AIMOEA>2.0.ZU;2-Z
Abstract
Measurements of excimer laser generated acoustic transients were perfo rmed both on the back surface of various ceramic samples and in the su rrounding gas. Several techniques of acoustic signal analysis were use d to study the correlation between acoustic signal parameters and the ablation rate. The technique based on the defined ablation parameter E (s) is proved to be suitable for monitoring the excimer laser ablation processes.