STRUCTURAL-PROPERTIES OF HETEROEPITAXIAL SYSTEMS USING HYBRID MULTIPLE DIFFRACTION IN RENNINGER SCANS

A method of characterizing heteroepitaxial structures using hybrid mul tiple diffractions (hybrid MD) which appear in the layer Renninger sca ns (RS) together with the normal MD features, is reported. The three b eam surface MD cases are used to provide high intensity and structural sensitivity. The RS peak measurements around the symmetry mirrors all ow for the layer parallel lattice parameter determination. A simulatio n program was developed in order to account for the influence of the w avelength, incident beam divergence, sample mosaic spread, and substra te/layer lattice misorientation in the correct position and profile of the RS peaks. GaAs/Si samples with different layer thicknesses have b een analyzed as an application of the method.