MECHANICAL SPECTROSCOPY AND STRUCTURAL EVOLUTION OF THIN CUMO FILMS

It is well known that in thin metallic films, the anelastic and the el astic properties show some characteristic features linked to the speci fic microstructure. The studied films Cu30Mo70, with a typical thickne ss of 200nm are deposited by Ion Beam Sputtering (IBS) on oxidised sil icon (100) substrates. The measurements are performed on a vibrating r eed device adapted for thin adherent films over a temperature range be tween 20 degrees C and 450 degrees C. This paper reports the combined results of internal friction, elastic modulus and internal stresses me asured during thermal cycling. ''Direct'' observations of the microstr ucture are performed by X-Ray diffraction. We have correlated the modi fications of the mechanical properties with the structural evolution o f these metastable systems.