PRECIPITATION OF FILMS FROM VOLATILE COMPLEX-COMPOUNDS ON SOLID SUBSTRATE SURFACE

Authors
POLYAKOV OV BADALYAN AM
Citation
Ov. Polyakov et Am. Badalyan, PRECIPITATION OF FILMS FROM VOLATILE COMPLEX-COMPOUNDS ON SOLID SUBSTRATE SURFACE, Pis'ma v Zurnal tehniceskoj fiziki, 19(5), 1993, pp. 60-62
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
Pis'ma v Zurnal tehniceskoj fiziki → ACNP
ISSN journal
03200116
Volume
19
Issue
5
Year of publication
1993
Pages
60 - 62
Database
ISI
SICI code
0320-0116(1993)19:5<60:POFFVC>2.0.ZU;2-1