QUANTITATIVE SCANNING ELECTRON ACOUSTIC MICROSCOPY OF SILICON

So far results of scanning electron acoustic microscopy (SEAM) have re tained a widely qualitative meaning only due to the enormous uncertain ty in understanding sound generation and contrast mechanisms in SEAM m icrographs. In this work, a detailed treatment of these mechanisms has been undertaken for silicon resulting in precise knowledge of the sig nal generation processes and a well understood interpretation of the c ontrast mechanisms involved in imaging thermo-mechanical and electroni c features.