METHOD OF MEASUREMENT AND ANALYSIS OF TEXTURE IN THIN-FILMS

A method of measurement and analysis of texture in thin films is propo sed. In this method, the incidence angle of the X-ray beam is low and is kept constant during the measurements. This requirement allows info rmation to be obtained from a thin surface layer of the specimen. Howe ver, it limits the area on the pole figure from which data can be meas ured. Quantitative analysis of various factors and parameters which af fect the X-ray penetration depth and the measured area of the pole fig ure is proposed. The proposed method was implemented and tested and th e results obtained were used to calculate the crystal orientation dist ribution function.