VUV DIAGNOSTIC OF THE PLASMA OF AN ECR ION-SOURCE

Spectroscopic investigation in the 18-160 nm spectral range of the pla sma generated by a 10 GHz Electron Cyclotron Resonance (E.C.R.) ion so urce has been realised. Preliminary results are based on oxygen. OV li ne intensity ratios measurements inside the plasma are investigated as a function of the RF power and of the oxygen density injected in the main chamber of the source. Results are correlated with the extracted O4+ current. An electronic density of 10(11) e-/cm3 and an electronic temperature of 30 eV have been derived from the computed results of Ka to et al.