From the transmission electron microscope (TEM) observation of ZnSe ho
moepitaxial films, it is clarified that the major pre-existing defects
in the film are Shockley extended dislocations. Correlation between t
he etch pits and the Shockley extended dislocations are also confirmed
. The degradation mode of a ZnCdSe/ZnSe homoepitaxial light emitting d
iode (LED) is discussed on the basis of the microscopic observation. M
any dark spot defects (DSDs) are observed in the emission pattern just
after turn-on, and they enlarge and become pronounced keeping their r
ound shape. The growth velocity of the DSD is less than 0.056 mu m/min
for the current density of 408 A/cm(2). The DSD density is almost the
same as the etch pit density (EPD) of the as-grown LED wafer.