OPTICAL INTERFERENCE FILTERS WITH CONTINUOUS REFRACTIVE-INDEX MODULATIONS BY MICROWAVE PLASMA-ASSISTED CHEMICAL-VAPOR DEPOSITION

Authors
GREENHAM AC NICHOLS BA WOOD RM NOURSHARGH N LEWIS KL
Citation
Ac. Greenham et al., OPTICAL INTERFERENCE FILTERS WITH CONTINUOUS REFRACTIVE-INDEX MODULATIONS BY MICROWAVE PLASMA-ASSISTED CHEMICAL-VAPOR DEPOSITION, Optical engineering, 32(5), 1993, pp. 1018-1024
Citations number
6
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
32
Issue
5
Year of publication
1993
Pages
1018 - 1024
Database
ISI
SICI code
0091-3286(1993)32:5<1018:OIFWCR>2.0.ZU;2-8
Abstract
Optical interference filters that have continuously modulated refracti ve indices throughout their thicknesses (rugates) are designed and fab ricated using a microwave plasma-assisted chemical vapor deposition te chnique. Examples are shown of single- and double-response narrow-band reflection filters made from variable composition silicon oxynitride deposited on silica. Reflectivities in excess of 99.9% have been reali zed with bandwidths in the 2 to 10% range.