SURFACE-ENHANCED RAMAN-SCATTERING OF AMORPHOUS SILICON-CARBON FILMS

Authors
TZOLOV MB TZENOV NV DIMOVAMALINOVSKA DI YANKOV DY
Citation
Mb. Tzolov et al., SURFACE-ENHANCED RAMAN-SCATTERING OF AMORPHOUS SILICON-CARBON FILMS, Applied physics letters, 62(19), 1993, pp. 2396-2398
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
62
Issue
19
Year of publication
1993
Pages
2396 - 2398
Database
ISI
SICI code
0003-6951(1993)62:19<2396:SROASF>2.0.ZU;2-9
Abstract
Surface-enhanced Raman scattering has been used to study the surface o f magnetron sputtered amorphous silicon-carbon alloys applying the sil ver overlayer method. The presence of clusters from the sputtered mate rial and different types of carbon-carbon bond configurations has been detected on the film surface. It has been shown that structural trans formations which are not related to the hydrogen in the plasma take pl ace on the surface.