The dislocation microstructure associated with the loss of coherency o
f CdTe(001), as grown on GaAs(001), is characterized using high-resolu
tion transmission electron microscopy. The examination of cross-sectio
nal specimens allowed characteristic local variations in the relative
orientation of the overgrowth and the substrate to be quantified and r
elated to associated local changes in the form and distribution of the
interface dislocation array. In the interface array, the relative pro
portion of 60-degrees dislocations and Lomer-Cottrell locks proved to
be related to the local misorientation between the CdTe and GaAs. The
extent to which this is indicative of the mode of stress relief during
the loss of coherency is discussed. Interestingly, it was also found
that such variations in the relative proportions of the different type
s of dislocation proved to be associated with microtwin formation. The
significance of this with regard to the strain relief mechanism is al
so noted.