The stability of the luminescence from porous Si has been improved by
rapid thermal oxidation. As-prepared and oxidized samples have been co
mpared by cathodoluminescence and photoluminescence. Electron beam exc
itation resulted in rapid decay of the porous Si emission from as-prep
ared samples. Photoluminescence measurements from as-prepared samples
in oxygen showed a similar degradation. In contrast, the rapid thermal
oxidized samples showed a dramatic improvement in stability under eit
her electron beam or photoexcitation.