LOW-ENERGY ION-SCATTERING AT SURFACES

The field of low-energy ion scattering for surface interactions at met als, alloys, catalysts and semiconductors is reviewed. The description of experimental set-up's for ion and neutral detection has been inclu ded. One of the topics is ion scattering for elemental analysis of the topmost layer to be performed in the classical noble-gas ion scatteri ng spectroscopy approach (ISS) as well as with direct recoil spectrosc opy (DRS). Emphasis has also been put on surface structure analysis in cluding ion beam crystallography with low-energy ion backscattering (I CISS) for single-crystal surfaces. The basic principles, classical sca ttering theory, the effect of shadowing and blocking, and some of the computer simulation programs are briefly described. A discussion for u nderstanding the physics of ion-surface interactions, charge exchange of various projectiles during collisions, molecule scattering and bond breaking is also included.