A new alignment method of optical axes for efficient coupling is devel
oped, and its performance is examined. The optical axis is positioned
by bending the flexible fiber like a cantilever beam by using an elect
rostatic force. It is shown that the end of the flexible fiber is scan
ned over an approximately 10 mum x 10 mum area in two dimensions, and
the low-loss coupling is attained by searching the peak transmission i
ntensity of light signal through coupling. The feasibility of applying
this alignment method for practical use is discussed in terms of whet
her it satisfies the specifications for a coupling in which multiple a
xes are aligned individually.