DETERMINATION OF THE OPTICAL-CONSTANTS OF SUBSTRATES BY ANGLE-OF-INCIDENCE DERIVATIVE ELLIPSOMETRY IN THE PRESENCE OF UNKNOWN SURFACE OVERLAYERS

Regions of precise measurement of surface complex optical dielectric c onstants are found in the presence of unknown optically thin overlayer s by computer simulation of angle-of-incidence derivative ellipsometry experiments. The immersion method is considered as a tool for expandi ng the regions of satisfactory accuracy. The values of errors in the d etermination of substrate optical constants in the intervals -10 < eps ilon1 < 10 and 0 < epsilon2 < 20 are shown.