LOW-ENERGY H-3-SCATTERING FROM THE SI(100) SURFACE( MOLECULAR ION)

Low energy (1200 eV) H-3+ molecular ion scattering (LEMIS) from the Si (100)(2 + 1) surface was studied. Energy spectra of scattered positive ions were measured as functions of incidence and exit angles. In the scattering spectrum, the only detected positive ion species was H+, me aning that the H-3+ was dissociatively scattered. Dissociation by an i mpulsive force and dissociation with neutralization are discussed as p ossible mechanisms of the H-3+ dissociative scattering. The scattering angle dependence of the surface peak energy supports the former mecha nism.