The structures of the alkali metal (K, Cs) adsorbed Si(001)(2 x 1) sur
face have been studied by tensor LEED. A reliability factor (R factor)
analysis has been carried out for models having different sites for t
he alkali atoms, that is, a pedestal site model (so called Levine's mo
del), a cave site model and a double-layer model. Although the differe
nce between the numerical values of R is small for these models, the s
mallest R factor is obtained for the double-layer model with a symmetr
ic dimer model for the topmost Si atoms.