CLEAN SI(110) - A SURFACE WITH INTRINSIC OR EXTRINSIC DEFECTS

Citation
N. Safta et al., CLEAN SI(110) - A SURFACE WITH INTRINSIC OR EXTRINSIC DEFECTS, Surface science, 287, 1993, pp. 312-316
Citations number
16
Categorie Soggetti
Chemistry Physical
Journal title
ISSN journal
00396028
Volume
287
Year of publication
1993
Part
A
Pages
312 - 316
Database
ISI
SICI code
0039-6028(1993)287:<312:CS-ASW>2.0.ZU;2-X
Abstract
Clean surfaces of n-type, low doped silicon samples cut along the (I 1 0) plane or along properly chosen vicinal ones have been studied by lo w energy electron diffraction, Auger electron spectroscopy and photoem ission yield spectroscopy. Several procedures, combining treatments bo th outside and inside the ultrahigh vacuum chamber, have been used to get the smoothest and cleanest surfaces. It is found that the surface always contains a high density of structural defects as proved by the LEED measurements and by the work function and the tail of filled surf ace states in the gap. Compared results between nominal and vicinal (1 10) surface show the dominance of intrinsic (like along the Si(111)(7 x 7) reconstructed surface) over extrinsic (poor preparation procedure s) defects.