We present details of an efficient semivectorial beam propagation meth
od. In this method, the propagation is performed by solving the finite
-difference equation in alternating directions. Different from traditi
onal split-operator beam propagation method, the index term is not sep
arated from spatial differentiations. Since boundary conditions at die
lectric interfaces can be satisfied by two orthogonal polarizations in
dividually, the method is semivectorial. The performance can be enhanc
ed by using a nonuniform grid. By modifying the routine, it can also b
e applied to periodic structures. Numerical results of rib waveguides
are presented.