QUALITATIVE-ANALYSIS OF THIN COATINGS ON LENSES - A COMPARISON OF INFRARED SPECTROSCOPIC TECHNIQUES

Authors
COMPTON SV STOUT P
Citation
Sv. Compton et P. Stout, QUALITATIVE-ANALYSIS OF THIN COATINGS ON LENSES - A COMPARISON OF INFRARED SPECTROSCOPIC TECHNIQUES, American laboratory, 25(8), 1993, pp. 36
Citations number
8
Categorie Soggetti
Instument & Instrumentation","Chemistry Analytical
Journal title
American laboratory → ACNP
ISSN journal
00447749
Volume
25
Issue
8
Year of publication
1993
Database
ISI
SICI code
0044-7749(1993)25:8<36:QOTCOL>2.0.ZU;2-A
Abstract
An application of ion chromatography is described for the determinatio n of impurities in gases used in the fabrication of semiconductors.