A FAST METHOD FOR THE SIMULATION OF XPS AND AES SPECTRA

Authors
ALKEMADE PFA WERNER K RADELAAR S SLOOF WG
Citation
Pfa. Alkemade et al., A FAST METHOD FOR THE SIMULATION OF XPS AND AES SPECTRA, Applied surface science, 70-1, 1993, pp. 24-28
Citations number
16
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
70-1
Year of publication
1993
Part
A
Pages
24 - 28
Database
ISI
SICI code
0169-4332(1993)70-1:<24:AFMFTS>2.0.ZU;2-O
Abstract
Results of Monte Carlo simulation are often applied for quantitative X PS or AES analysis. In this work we show that for almost homogeneous s amples, translations and rotations of (Monte Carlo) simulated electron trajectories lead to a substantial reduction in computation time. The method is applied to angle-resolved XPS measurements. It is shown tha t the distribution of a low-concentration element in the outermost 50 angstrom of a solid can be measured quantitatively.