ELASTIC RECOIL DETECTION OF LIGHT-ELEMENTS (C, N, O) WITH HIGH-ENERGY(10-15 MEV) HE BEAMS

Authors
VANIJZENDOORN LJ RIJKEN HA KLEIN SS DEVOIGT MJA
Citation
Lj. Vanijzendoorn et al., ELASTIC RECOIL DETECTION OF LIGHT-ELEMENTS (C, N, O) WITH HIGH-ENERGY(10-15 MEV) HE BEAMS, Applied surface science, 70-1, 1993, pp. 58-62
Citations number
17
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
70-1
Year of publication
1993
Part
A
Pages
58 - 62
Database
ISI
SICI code
0169-4332(1993)70-1:<58:ERDOL(>2.0.ZU;2-B
Abstract
Elastic recoil detection (ERD) of carbon, nitrogen and oxygen from thi n films on thick substrates was demonstrated using 10-15 MeV He2+ ions and thin films detectors. Non-Rutherford scattering was used to alter the relative sensitivities for carbon, nitrogen and oxygen by selecti ng specific recoil angles and incident energies. A depth resolution of 15 nm near the surface can be easily achieved as well as probing dept hs up to approximately 500 nm.