BACKSCATTERING LIMITATIONS TO SPATIAL-RESOLUTION IN THE AUGER MICROPROBE

As Auger instrumentation for submicron analysis has improved with the introduction of field emission sources and multichannel detectors, the range of practical operating magnification has been pushed above 2000 0 x . This implies Auger analysis with spatial resolution comparable t o the range of the primary electrons in the solid and care must be tak en in interpreting results. Backscattering effects can limit spatial r esolution in Auger electron spectroscopy, especially in particle analy sis. An example of Auger analysis of a 0.7 mum cube of TiN on steel at 3 and 20 kV is shown, together with Monte Carlo simulations of electr on scattering (SEEL). Correlation of the model and experimental result s is in good agreement. In this case, lower primary beam voltage reduc es scattering limitations to spatial resolution. The optimum beam volt age for maximizing spatial resolution depends on the sample, on the Au ger transition being measured, and on the instrument.