MASK-LESS WRITING OF MICROSTRUCTURES WITH THE PISAM

Authors
VATERLEIN P WEISS M WUSTENHAGEN V UMBACH E
Citation
P. Vaterlein et al., MASK-LESS WRITING OF MICROSTRUCTURES WITH THE PISAM, Applied surface science, 70-1, 1993, pp. 278-282
Citations number
11
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
70-1
Year of publication
1993
Part
A
Pages
278 - 282
Database
ISI
SICI code
0169-4332(1993)70-1:<278:MWOMWT>2.0.ZU;2-D
Abstract
This paper demonstrates the quasi-simultaneous use of a newly develope d spectroscopic microprobe for ''direct writing'' of microstructures u sing high-brightness undulator radiation. Two examples, deposition of lines of Pd metal from a Pd-acetate film on Si(lll) and microstructure d polymerization of condensed monothiophene on Ag(lll), are given.