ECHELLE GRATING - CURVED WAVE-GUIDE DEMULTIPLEXER FOR PHOTONIC INTEGRATED-CIRCUITS

A grating spectrometer integrated with curved output wave guides was d esigned and fabricated in GaAs-AlGaAs waveguide structure for use in t he 1 mum wavelength range. By incorporating curved wave guides, a larg er separation between output facets was obtained. This is desirable fo r future integration. High-quality patterns were fabricated by focused ion beam lithography and reactive ion etching. Eight outputs with a c hannel spacing of 2 nm were obtained. The potential of the structure f or integration with active components is discussed.