The optical and structural properties of porous Si films produced by e
lectrochemical and chemical dissolution of Si have been studied by a v
ariety of techniques. Raman scattering and transmission electron micro
scopy have shown the samples to contain crystalline Si wires and (or)
spherites 3-8 nm in diameter and (or) amorphous Si. The optical absorp
tion spectra and the wavelength, temperature, and lifetime dependence
of the photoluminescence obtained from most of the samples are entirel
y consistent with the quantum confinement of excitons in Si nanostruct
ures. Quite different photoluminescence was obtained from other sample
s composed only of amorphous Si, and this is attributed to the presenc
e of silicon oxyhydride species.