Indentation hardness tests were performed on thick, fine-grained, elec
tro-formed deposits of copper and nickel using Knoop, Vickers, and Ber
kovich indenters. The latter type of indenter was used for shallow pen
etrations (85-1750nm), and results are reported in terms of nanoscale
hardness (NH) numbers. Knoop and Vickers indenters were used with appl
ied loads of between 0.15 and 0.98 N, and at the lowest load, produced
indentation depths comparable to the larger ones obtained with the Be
rkovich indenter. The NH numbers became very sensitive to penetration
depth when the penetration depth was less than certain critical values
. NH numbers for Cu and Ni were higher than those for Knoop and Vicker
s testing at comparable penetration depths. Applying indenter area fun
ction corrections to calculate hardness numbers (i.e., considering pro
jected area versus facet contact area) resulted in a closer correlatio
n between microhardness and nanohardness scales; however, changes in t
he tip shape because of wear or other imperfections.can lead to inaccu
rate calculation of NH numbers at the lowest loads. Results also sugge
st that the interconversion of lowload hardness numbers from one scale
to another can be material-dependent.