The use of the viscoelastic properties of polymer films in a Finite El
ement Method (FEM) analysis has been developed. To check the validity
of the analysis, the residual stresses developed in three polymer film
s, biphenyldianhydride - phenyldiamine (BPDA-PDA), hexafluorodianhydri
de - aminophenoxybiphenylin (HFDA-APBP) an divinylsiloxane - bisbenzoc
yclobutene (DVS-BCB) attached to silicon substrates, upon cooling from
their curing temperatures, have been calculated The calculated stress
es agree well with reported experimental data. Linear elastic analyses
have also been included for comparison.