SELF-ASSEMBLY OF 3-DIMENSIONAL MICROSTRUCTURES USING ROTATION BY SURFACE-TENSION FORCES

The authors propose that automatic, parallel and self-limiting operati ons can be performed to structures into full three-dimensional geometr ies, using the surface tension forces provided by molten solder to per form out-of-plane rotation of flexible hinges. Analysis is presented w hich indicates that the final angle of rotation can be controlled thro ugh initial solder volume, and that the forces are easily sufficient f or the particular example of silicon micromechanical devices. However, the principle is general and could be applied to other materials.