FORMATION OF OPTICAL SLAB WAVE-GUIDES USING THERMAL-OXIDATION OF SIOX

Authors
LAI Q PLISKA P SCHMID J HUNZIKER W MELCHIOR H
Citation
Q. Lai et al., FORMATION OF OPTICAL SLAB WAVE-GUIDES USING THERMAL-OXIDATION OF SIOX, Electronics Letters, 29(8), 1993, pp. 714-716
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
29
Issue
8
Year of publication
1993
Pages
714 - 716
Database
ISI
SICI code
0013-5194(1993)29:8<714:FOOSWU>2.0.ZU;2-F
Abstract
A novel method for the fabrication of optical slab waveguides is prese nted. After growth of the base cladding by thermal oxidation and depos ition of the core layer of the waveguide by PECVD of SiO(x), the top c ladding layer is formed from the core layer material by an additional thermal oxidation which transforms SiO(x) into SiO2. With this simple technology, contaminations and rough interfaces between core and cladd ing are avoided. Low propagation losses and good matching to optical f ibres are achieved.