IMPROVED TRIANGULAR VOLTAGE SWEEP (TVS) TECHNIQUE FOR MEASUREMENT OF IONIC CHARGE IN MOS STRUCTURES

Authors
Citation
J. Quick et P. Schley, IMPROVED TRIANGULAR VOLTAGE SWEEP (TVS) TECHNIQUE FOR MEASUREMENT OF IONIC CHARGE IN MOS STRUCTURES, Electronics Letters, 29(3), 1993, pp. 275-277
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
ISSN journal
00135194
Volume
29
Issue
3
Year of publication
1993
Pages
275 - 277
Database
ISI
SICI code
0013-5194(1993)29:3<275:ITVS(T>2.0.ZU;2-H
Abstract
The sensitivity and accuracy of the conventional TVS technique is infl uenced by a capacitive current associated with the MOS capacitor which is superimposed on the ionic current. The Letter presents a new metho d and measuring circuit for automatic compensation of the capacitive c urrent at the input of the current measuring instrument.