DETERMINATION OF ULTRATRACE SODIUM, POTASSIUM AND IRON IN PHOTORESISTBY GRAPHITE-FURNACE AAS AFTER SEVERAL SAMPLE TREATMENT PROCEDURES

Authors
TAKENAKA M KOZUKA S HASHIMOTO Y
Citation
M. Takenaka et al., DETERMINATION OF ULTRATRACE SODIUM, POTASSIUM AND IRON IN PHOTORESISTBY GRAPHITE-FURNACE AAS AFTER SEVERAL SAMPLE TREATMENT PROCEDURES, Bunseki Kagaku, 42(5), 1993, pp. 71-75
Citations number
3
Categorie Soggetti
Chemistry Analytical
Journal title
Bunseki Kagaku → ACNP
ISSN journal
05251931
Volume
42
Issue
5
Year of publication
1993
Pages
71 - 75
Database
ISI
SICI code
0525-1931(1993)42:5<71:DOUSPA>2.0.ZU;2-3
Abstract
Some analytical procedures were studied for the determination of ultra trace concentrations of Na, K and Fe in photoresist used ULSI by GFAAS . These procedures were as follows: 1) acid decomposition (HNO3+HClO4) ; 2) tetramethylammonium hydroxide (TMAH) digestion; 3) dilution by ac etone; 4) extraction with HCl-4-methyl-2-pentanone (MIBK) for Fe; and 5) extraction with hot water for Na and K. The results of this analysi s showed the observed values by these procedures were in good agreemen t with each other. The detection limits were Na, K: 0.01 ppb, Fe: 0.1 ppb respectively.