The structure of barium-deficient YBa2-yCu3O7-x (y almost-equal-to 0.3
) thin films was investigated using analytical electron microscopy. Th
e films were grown in situ on SrTiO3 by laser deposition and exhibited
quite perfect superconducting properties (T(c) up to 91 K, J(c) > 10(
6) A cm-2 at 77 K). The excess yttrium and copper combined with a rela
tively low growth temperature, produces several microstructural featur
es, e.g. cation disorder, planar faults and precipitation yttrium-and/
or copper-rich secondary phases. In spite their rather defective struc
ture, the superconducting parameters of the films are good. These resu
lts confirm the proposal that certain defects enhance the high tempera
ture superconducting properties. Barium-deficient and perfectly stoich
iometric films were compared. Stoichiometric films with minimum conten
ts of structural defects still display the highest parameters.