SYNTHESIS AND CHARACTERIZATION OF TITANIUM HYDRIDE THIN-FILMS OBTAINED BY REACTIVE CATHODIC SPUTTERING

Authors
MEUNIER G MANAUD JP GRALL P
Citation
G. Meunier et al., SYNTHESIS AND CHARACTERIZATION OF TITANIUM HYDRIDE THIN-FILMS OBTAINED BY REACTIVE CATHODIC SPUTTERING, Materials science & engineering. B, Solid-state materials for advanced technology, 18(3), 1993, pp. 303-307
Citations number
11
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
18
Issue
3
Year of publication
1993
Pages
303 - 307
Database
ISI
SICI code
0921-5107(1993)18:3<303:SACOTH>2.0.ZU;2-I
Abstract
Thin films of titanium hydride were obtained by reactive cathodic sput tering with a titanium target using different compositions of a mixtur e of hydrogen and argon as sputtering gas. The layered material is qui te different from the bulk material: only a poorly crystallized phase with formula TiH1.7 was synthesized at room temperature for all the ga s mixtures investigated. The density measured by Rutherford backscatte ring spectrometry and X-ray absorption is slightly lower than that of the bulk hydride. These titanium hydride films can be used as a bindin g compound in metal-ceramic brazing.