HEAVY-ION RBS ANALYSIS OF STRAINED-LAYER SUPERLATTICES

The extension of Rutherford backscattering spectrometry (RBS) to heavi er mass projectiles has several advantages over conventional RBS. To u nderstand the interaction of heavy ions with solids properly, a system atic study of the energy straggling of MeV heavy ions has led to an em pirical formula for this term. This formula, along with the stopping p ower, lateral spread and multiple scattering, predicts the energy widt h for a wide range of energies, projectiles and targets, allowing the development of realistic computer simulation for the energy spectra. T his model has been verified by measurements of the depth resolution of 4 and 6 MeV C projectiles using Si/Si1-xGex/Si strained layer superla ttices (SLSs) samples.