Q. Yang et al., HEAVY-ION RBS ANALYSIS OF STRAINED-LAYER SUPERLATTICES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 74(3), 1993, pp. 431-438
The extension of Rutherford backscattering spectrometry (RBS) to heavi
er mass projectiles has several advantages over conventional RBS. To u
nderstand the interaction of heavy ions with solids properly, a system
atic study of the energy straggling of MeV heavy ions has led to an em
pirical formula for this term. This formula, along with the stopping p
ower, lateral spread and multiple scattering, predicts the energy widt
h for a wide range of energies, projectiles and targets, allowing the
development of realistic computer simulation for the energy spectra. T
his model has been verified by measurements of the depth resolution of
4 and 6 MeV C projectiles using Si/Si1-xGex/Si strained layer superla
ttices (SLSs) samples.