A BROAD BEAM MICROWAVE N+ ION-SOURCE

Authors
FARCHI A AUBERT J WARTSKI L COSTE P MARDIROSSIAN C
Citation
A. Farchi et al., A BROAD BEAM MICROWAVE N+ ION-SOURCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 74(3), 1993, pp. 457-459
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
74
Issue
3
Year of publication
1993
Pages
457 - 459
Database
ISI
SICI code
0168-583X(1993)74:3<457:ABBMNI>2.0.ZU;2-3
Abstract
We have built an electrostatic reflex ion source (ERIS) equipped with a microwave ECR cathode at 2.45 GHz in order to produce reactive broad ion beams (84 mm in diameter) such as oxygen or nitrogen. In the case of nitrogen, the proportion of atomic ions N+ with respect to molecul ar ions N+ has been optimized versus the plasma parameters: pressure o f neutrals, dc discharge voltage, microwave power. Best results, illus trated by a 98% proportion of atomic ions, were obtained with a pressu re of 2 x 10(-3) mbar in the ''anodic chamber'', a microwave power of 125 W and a discharge voltage of 300 V.