3-DIMENSIONAL COMPUTER-SIMULATION OF GAS-FLOW AND PARTICLE-TRANSPORT IN A HORIZONTAL DIFFUSION FURNACE

Numerical simulation of gas flow, heat transfer, and particle transpor t in a horizontal diffusion is presented. The wafers are cooled by inl et cold gas convectively but heated by furnace wall radiatively. Gas v elocity between the wafers appears to be small compared with the bulk gas flow. A significant cooling of the first wafer in the batch is obs erved. Trajectories of aerosol particles in the furnace are predicted by solving the corresponding Lagrangian equation of motion that includ es effects of temperature, drag, lift, gravity, and Brownian motion. P article transport and deposition on the wafers are evaluated using thr ee-dimensional particle trajectories.