A SIMPLE SELF-PROPELLED 2-DIMENSIONAL MICROPOSITIONER

Authors
Citation
Bl. Blackford, A SIMPLE SELF-PROPELLED 2-DIMENSIONAL MICROPOSITIONER, Review of scientific instruments, 64(5), 1993, pp. 1360-1361
Citations number
10
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
ISSN journal
00346748
Volume
64
Issue
5
Year of publication
1993
Pages
1360 - 1361
Database
ISI
SICI code
0034-6748(1993)64:5<1360:ASS2M>2.0.ZU;2-0
Abstract
A quartz tube is propelled horizontally along a quartz track by the st ick-slip inertial slider method, activated by the longitudinal mode of a piezoelectric tube mounted inside the quartz tube. Two-dimensional motion is achieved by rotation of the quartz tube, activated by the be nding mode of the piezo. With a sample attached to the quartz tube, th e device is an excellent replacement for the electrostatic-clamp type of walker used as the coarse approach mechanism in scanning probe micr oscopes (SPMs). Alternatively, by attaching the tip (or sample) to the piezo tube, the device can function as a very simple SPM in which the same piezo tube is used for coarse approach and for scanning. The dev ice performs reliably in air and high vacuum, and is ultrahigh vacuum compatible. Step sizes from 10 to 1000 nm, and speeds up to 0.2 mm/s a re possible.