High spatial frequency lamellar gratings are shown to function as phas
e compensators, quarter-wave and half-wave retarders, and polarization
rotators that operate on specularly reflected (zeroth-order) beams. T
hese gratings are designed using rigorous coupled-wave and modal grati
ng diffraction theories. Controlling the geometrical parameters of the
se gratings allows for engineering the phase retardation and polarizat
ion conversion introduced to a reflected beam. Fabrication and operati
onal tolerances for these elements are discussed. Wavelength and polar
angle of incidence variation affect the performance of these elements
more strongly than variations in other geometrical and operational pa
rameters.