KINOFORM ARRAY ILLUMINATORS IN FUSED-SILICA

Authors
MILLER JM TAGHIZADEH MR TURUNEN J ROSS N NOPONEN E VASARA A
Citation
Jm. Miller et al., KINOFORM ARRAY ILLUMINATORS IN FUSED-SILICA, J. mod. opt., 40(4), 1993, pp. 723-732
Citations number
22
Categorie Soggetti
Optics
Journal title
J. mod. opt. → ACNP
ISSN journal
09500340
Volume
40
Issue
4
Year of publication
1993
Pages
723 - 732
Database
ISI
SICI code
0950-0340(1993)40:4<723:KAIIF>2.0.ZU;2-6
Abstract
High-efficiency (>90%) multilevel grating array illuminators are desig ned using nonlinear parametric optimization and analysed using rigorou s electromagnetic grating theory. Designs with eight and 16 relief dep th levels are fabricated in fused silica using reactive ion etching an d photolithography with three and four electron-beam generated binary amplitude masks, respectively.