OBTENTION OF PRESSURES IN THE 10-14 TORR RANGE BY MEANS OF A ZR-V-FE NONEVAPORABLE GETTER

Authors
BENVENUTI C CHIGGIATO P
Citation
C. Benvenuti et P. Chiggiato, OBTENTION OF PRESSURES IN THE 10-14 TORR RANGE BY MEANS OF A ZR-V-FE NONEVAPORABLE GETTER, Vacuum, 44(5-7), 1993, pp. 511-513
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
44
Issue
5-7
Year of publication
1993
Pages
511 - 513
Database
ISI
SICI code
0042-207X(1993)44:5-7<511:OOPIT1>2.0.ZU;2-4
Abstract
Pressures in the low 10(-14) torr range have been reproducibly achieve d in a 3 m long vacuum chamber. Pumping was provided by a 400 l s-1 sp utter-ion pump, a titanium sublimation pump and 43.5 m of a Zr-V-Fe No n Evaporable Getter (NEG) strip. Activation of NEG has been passively achieved during the initial bakeout of the vacuum system. The pressure has been measured by means of a modified version of the Helmer gauge, designed and manufactured at CERN.