MEASUREMENT OF UHV AND XHV BY HOT CATHODE IONIZATION GAUGE WITH HIGHER SENSITIVITY

Authors
KUO YH KANAJI T
Citation
Yh. Kuo et T. Kanaji, MEASUREMENT OF UHV AND XHV BY HOT CATHODE IONIZATION GAUGE WITH HIGHER SENSITIVITY, Vacuum, 44(5-7), 1993, pp. 555-557
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
44
Issue
5-7
Year of publication
1993
Pages
555 - 557
Database
ISI
SICI code
0042-207X(1993)44:5-7<555:MOUAXB>2.0.ZU;2-C
Abstract
For pressure measurement in the regions of ultra-high vacuum or extrem e-high vacuum (less-than-or-equal-to 10(-10) Pa), several studies on n ew ionization gauges ha ve been accomplished in recent years in Japan and in China. The common feature of the new gauges is their high sensi tivity.