A MASS FILTER WITH A COLD-CATHODE

Authors
OGIWARA N SHIHO M UEDA Y
Citation
N. Ogiwara et al., A MASS FILTER WITH A COLD-CATHODE, Vacuum, 44(5-7), 1993, pp. 661-663
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
44
Issue
5-7
Year of publication
1993
Pages
661 - 663
Database
ISI
SICI code
0042-207X(1993)44:5-7<661:AMFWAC>2.0.ZU;2-#
Abstract
A Spindt-type field emitter array (FEA) has been tested in an ultrahig h vacuum as the electron source for a commercial quadrupole mass filte r. The FEA supplied the stable emission current of several mA. We demo nstrated that the thermal effect of the filament could be avoided thro ugh the use of the FEA. However, outgassing was observed from the FEA. The main species were H-2, CO, and CO2. In addition, and somewhat sur prisingly, a large quantity of fluorine was detected. This is ascribed to the residue in the FEA.